On the Possibility of Creating Humidity Sensors for Agriculture Based on Silicon-Germanium
Keywords:
Soil moisture meters, laboratory methods, soil moistureAbstract
This paper shows the possibility of creating a new type of sensor - semiconductor humidity sensors using silicon-germanium solid solutions. It has been proven that it is possible to create humidity sensors based on Si1-xGex solid solutions in the form of a Schottky barrier with a wide range of sensitivity to the relative humidity of the environment.
References
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Saidov A.S., Kutlimratov A., Sapaev B., Davlatov U.T. "On humidity sensitivities detected in Si1-xGex varizonal solid solutions obtained by liquid-phase epitaxy" / Tez.dokl. III-Russian Conference on "Materials Science and physico-chemical fundamentals of technologies for obtaining alloyed silicon crystals and instrument structures based on them", May 26-30, 2003, Moscow. –P.138.
Ulugmuradov N.H., Tursunova Z.B., Kutlimratov A., Sapaev B., Normatov O. "Investigation of moisture sensitivity of M – Si1-xGex structures" / Proceedings of the conference "Fundamental and applied questions of Physics" dedicated. To the 60th anniversary of FTI AN RUz, November 27-28, 2003, Tashkent. –pp.279-281.
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